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Pneumatic Isolation Systems

Delta K™ Pneumatic Isolation Systems Module

Low frequency and large amplitude vibrations can affect the accuracy, repeatability and throughput of precision measuring machines. A pneumatic isolation system must provide isolation of environmental vibration and shock while minimizing relative motion between the work-piece and stylus/probe. The vibration isolation system with Delta K™ controller is specifically designed to have a very high (stiff) spring rate when the machine is moving and a very low (soft) spring rate when the machine is measuring.

Fabreeka regularly designs pneumatic isolators for OEM applications having custom requirements. Specially designed diaphragms may be used to lower the horizontal natural frequency of an isolator to approach 1.5 Hz. Alternatively, natural frequencies as low as 0.4 Hz can be achieved using pendulums.

For cleanroom applications, the exhaust air from the levelling valves is vented and the isolators are made using cleanroom compatible materials, cleaned and packaged. Isolators can also be made using non-magnetic materials and designed to fit in any space envelope.

For space simulation testing in vacuum, Fabreeka can provide vacuum-compatible, pneumatic isolators. These isolators operate in low vacuum (1 x 10-7 Torr) and are manufactured with low outgassing, vacuum-compatible materials. The leak rate on these isolators is less than 1 x 10-7 cc/sec.

Key Features / Benefits :
Pneumatic Isolation Systems

• Can support payloads from 100 lbs to 40,000 lbs per isolator.
• Natural frequencies as low as 0.4 Hz.
• Custom designs to meet OEM requirements.